Thin Film sensors elements
Pt temperature sensors in thin-film technology can also be described as a two-dimensional, microscopic variation of the traditional wire wound type. The wire length and diameter are replaced by a very fine meander structure on a substrate. The manufacturing process is largely automated and thus incorporates the latest technologies, such as is found, for example, in silicon chip production.
Production
In the first production stage, precisely doped platinum, is vapour-deposited under vacuum onto an Al2O3 substrate. The next step is the photolithographic transfer of the extremely fine meander structure or electrode structure onto the blank platinum substrate under clean-room conditions (up to Class 1000). After thorough etching away of the excess platinum, the finished sensor element is produced into various versions.
Platinum thin-film sensors can also be selected in tolerance groups with a maximum Δt = 0.1 K over a range of 0°C to 100°C. For applications with high price sensitivity, other accuracy tolerances are also available.
Technical specifications and datasheets
C - Cryo Temperature Range sensor elements
| Products | Ohm (@°0C) | Temperature Coefficent (tc) | Size (mm) | Temp. range (°C) | ||
| Length | Width | Hight | ||||
| C220 | 100 | 3850 | 2,3 | 1,9 | 1 | -196...+150 |
| C420 | 1000 | 3850 | 3,9 | 1,9 | 1 | -196...+150 |
L - Low Temperature Range sensor elements
| Products | Ohm (@°C) | Temperature Coefficent (tc) | Size (mm) | Temp. range (°C) | ||
| Length | Width | Hight | ||||
| L220 | 100 | 3850 | 2,3 | 1,9 | 1,0 | -50...+400 |
| L220P | 100 | 3850 | 2,0 | 2,3 | 1,4 | -50...+400 |
| L416 | 100 | 3850 | 3,9 | 1,5 | 1,0 | -50...+400 |
| L420 | 100/500/1000 | 3850 | 3,9 | 2,0 | 1,0 | -50...+400 |
| L1020 | 100/500/1000 | 3850 | 9,5 | 1,9 | 1,0 | -50...+400 |
M - Medium Temperature Range
| Products | Ohm (@°0C) | Temperature Coefficent (tc) | Size (mm) | Temp. range (°C) | ||
| Length | Width | Hight | ||||
| M213 | 100/1000 | 3850 | 1,7 | 1,25 | 1,0 | -70...+500 |
| M219 | 100/1000 | 3850 | 2,1 | 1,9 | 0,9 | -70...+500 |
| M220 | 100 | 3850 | 2,3 | 1,9 | 0,9 | -70...+500 |
| M222 | 100/500/1000 | 3850 | 2,3 | 2,1 | 0,9 | -70...+500 |
| M310 | 100/500 | 3850 | 3,0 | 1,0 | 0,9 | -70...+500 |
| M416 | 100 | 3850 | 3,9 | 1,5 | 0,9 | -70...+500 |
| M422 | 100/500/1000 | 3850 | 3,9 | 2,1 | 0,9 | -70...+500 |
| M622 | 1000/2000 | 3850 | 5,9 | 2,1 | 0,9 | -70...+500 |
| M622 | 10000 | 3850 | 5,9 | 2,1 | 0,9 | -70...+500 |
| M1020 | 100/500/1000 | 3850 | 9,5 | 1,9 | 0,9 | -70...+500 |
| MH220 | 100 | 3850 | 2,3 | 1,9 | 1,0 | -70...+600 |
| MH416 | 100 | 3850 | 3,9 | 1,5 | 0,9 | -70...+600 |
| MH420 | 100/500/1000 | 3850 | 4,0 | 2,0 | 1,0 | -70...+600 |
| MH1020 | 100/500/1000 | 3850 | 9,5 | 1,9 | 1,0 | -70...+600 |
| MN222 | 1000 | 3850 | 2,3 | 2,1 | 0,9 | -70...+500 |
| MN420 | 100/1000 | 3850 | 3,9 | 1,9 | 0,9 | -70...+500 |
H - High Temperature Range
| Product | Ohm (@°0C) | Temperature Coefficent (tc) | Size (mm) | Temp. range (°C) | ||
| Length | Width | Hight | ||||
| HD421 | 100 | 3850 | 4.1 | 2.2 | 1.2 | -70...+800 |
| HL220 | 1000 | 3850 | 2,3 | 1,9 | 1,0 | -70...+750 |
